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教 師 基 本 資 料 |
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姓名 |
方昭訓 |
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英文名 |
Jau-Shiung Fang |
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性別 |
男 |
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現(兼)職稱 |
教授 |
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聯絡電話 |
(05) 631-5466 |
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E-mail |
jsfang@nfu.edu.tw |
經 歷 & 專 長 |
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主要學歷 |
國立清華大學材料科學與工 |
專長與研究領域 |
薄膜製造技術/半導體製程/微電子材料/平面顯示器製程/ 薄膜太陽能電池元件/光電元件/奈米磁性材料/磁阻薄膜材料 |
相關經歷 |
聯華電子股份有限公司技術開發部1997/9–2000/7 國立虎尾科技大學材料系2000/8-迄今 |
曾執行之計畫(國科會及各種產學計畫) |
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補助或委託機構 |
起迄年月 |
計畫名稱(計畫編號) |
國科會 |
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超薄TaSi |
國科會 |
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CIGS化合物薄膜光伏元件之研製-創新型CIGS光伏元件背面電極研製與整合特性 (NSC96-2221-E-150-034) |
國科會 |
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高透光率/高導電度透明導電氧化物薄膜研製 (NSC96-2622-E-150-003-CC3) |
國科會 |
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離子束沉積/電漿改質光伏元件透明導電薄膜製程特性(重點研究計畫) (NSC 95-2221-E-150-006) |
國科會 |
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離子束濺鍍製備薄膜電晶體同合金薄膜閘極、源/汲極製程 (NSC 94-2622-E-150-029-CC3) |
國科會 |
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離子束濺鍍/緻密新穎鉭基非晶質薄膜擴散阻礙特性與銅製程整合 (NSC 94-2216-E-150-004) |
國科會 |
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可撓式顯示器技術的新式低溫多晶矽薄膜電晶體製程 (NSC93-2262-E-150-054-CC3) |
國科會 |
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高導電性非晶質鉭基擴散阻礙層製備與銅金屬化製程整合 (II) (NSC93-2215-E-150-004) |
國科會 |
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高導電性非晶質鉭基擴散阻礙層製備與銅金屬化製程整合 (I) (NSC92-2215-E-150-004) |
國科會 |
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無電鍍製備次微米自行對準矽化物與銅製程整合研究 (NSC-91-2215-E-150-001) |
國科會 |
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高溫濺鍍現場沈積自行對準矽化物(COSI2與NISI)與銅金屬化製程之整合研究 (NSC90-2215-E-150-001) |
研 究 成 果 目 錄 |
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期 刊 論 文 |
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國外期刊 |
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1 |
Jau-Shiung Fang, Chin-Fu Chiu, Jia-Huei Lin, |
2 |
C.S. Hsu, H.Y. Hsieh, and J.S. Fang (2008) “Enhancement of Oxidation Resistance and Electrical Properties of Indium-Doped Copper Thin Films” J. Electro. Mater. 37 (6) 852-859. (SCI). |
3 |
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4 |
J.S. Fang, T.P. Hsu, M.L. Ker, H.C. Chen, J.H. Lee, C.S. Hsu, and L.C. Yang, (2008) “Evaluation of properties of Ta-Ni amorphous thin film for copper metallization in integrated circuits” J. Phys. Chem. Solids, 69, 430 – 434. (SCI). |
5 |
T.Y. Lin, H.Y. Cheng, T.S. Chin, C.F. Chiu, and J.S. Fang (2007) “5-nm-thick TaSiC amorphous films stable up to 750oC as a diffusion-barrier for copper metallization” Appl. Phys. Lett. 91, 152908(SCI). |
6 |
J.S. Fang, M.L. Ker and H.C. Chen, (2007)”Evaluation of dc-sputtered Glassy Ta-Co-N Thin Film for Copper Metallization” J. Electro. Mater.,36 (11) 1462-1468. (SCI). |
7 |
J.S. Fang, T.P. Hsu, and H.C. Chen, (2007)” Barrier Properties of Amorphous Binary Ta-Ni Thin Films for Cu Interconnection” J. Electro. Mater. 36 (5) 614-622(SCI). |
8 |
J.S. Fang and H.Y. Hsieh, (2007)” Structural and passivative behaviors of Cu(In) thin film” J. Electro. Mater. 36 (2) 129-135 (SCI). |
9 |
J.K. Hsiao, M.F. Tai, Y.C. Lee, C.Y. Yang, H.Y. Wang, H.M. Liu, J.S. Fang, and S.T. Chen, (2006) “Labelling of cultured macrophages with novel magnetic nanoparticles” J. Magn. Magn. Mater., 304, c4-c6.(SCI). |
10 |
J.S. Fang, T.P. Hsu, and G.S. Chen, (2006) “Crystallization and failure behavior of Ta-TM (TM = Fe, Co) nanostructured/amorphous diffusion barriers for copper metallization” J. Elec. Mater., 35 (1) 15-21.(SCI). |
11 |
W.K. Wang, D.S. Wuu, W.C. Shih, J.S. Fang, C.E. Lee, W.Y. Lin, P. Han, R.H. Horng, T.C. Hsu, T.C. Huo, M.J. Jou, A. Lin and Y.H. Yu (2005) “Near-Ultraviolet InGaN/GaN Light-Emitting Diodes Growm on Patterned Sapphire Substrates” J. J. Appl. Phys., 44(4) 2512-2515.(SCI). |
12 |
D.S. Wuu, W.K. Wang, W.C. Shih, R.H. Horng, C.E. Lee, W.Y. Lin, and J.S. Fang (2005)”Ehanced output power of near-ultraviolet InGaN-GaN LEDs frown on patterned sapphire substrates”, IEEE Photon. Technol. Lett., 17(2) 288-290.(SCI). |
13 |
J.S. Fang, T.P. HSU and G.S. CHEN (2004), “Crystallization and failure behaviors of Ta-Ni nanostructured/amorphous diffusion barriers for copper metallization” Journal of Electronic materials, 33(10) 1176-1181.(SCI). |
14 |
H.L.Chang, J.S. Fang and C.T. Kuo (2003), “Structures and properties of the crystalline Si-C-N using additional Si-source and Co-catalyst” Review on Advanced Materials Science vol 5, 432-439(SCI). |
15 |
H.L.Chang, J.S. Fang and C.T. Kuo (2003), “Growth model of carbon nanotubes assisted with Co-based catalyst” Review on Advanced Materials Science, vol 5, 425-431(SCIE). |
16 |
J.S Fang, H.L. Chang, G.S. Chen, and P.Y. Lee (2003), “Crystallization and failure behaviors of Ta-Co nanostructured/amorphous diffusion barriers for copper metallization” Review on Advanced Materials Science, vol 5, 510-513.(SCIE). |
17 |
J. S. Fang, F.W. Tsai, and T.S. Chin, (2003), “Enhancement of [ |
18 |
G.S. Chen, J.J. Gua, C.K. Lin, C.S. Hsu, L.C. Yang, and J.S. Fang, (2002), “Evaluation of radio-frequency sputter-deposited textured TiN thin films as diffusion barriers between copper and silicon” J.Vac. Surf. Tech., A 20(2) 479-485 (SCI). |
19 |
J. S. Fang, F.W. Tsai, and T.S. chin, (2002), “Highly Textured LaCaMnO Thin Films Grown on SiO/Si(100)”, Jpn. J. Appl. Phys., vol. 41, 600-605 (SCI). |
20 |
J.S. Fang, C.T. Chang, and T.S. Chin, (2001), “Electric properties of barium-strontium titanate thin films deposited by two-step radio-frequency sputtering”, J. Mater. Res., Vol. 16, No. 9 p.2680-2686. (SCI). |
21 |
J.S. Fang, M.R. Jian, T.S. Chin, H.W. Zhang, B.G. Shen, (2000) “Magnetic Viscosity of NdFe11TiNx Thin Films”, Jpn. J. Appl. Phys., vol. 39, p.496. (SCI). |
22 |
J.C. Shih, T.S. Chin, C.A Chen, and J.S. Fang, (1999), “ The Effect of Beryllium Addition on Magnetostriction of the Tb0.3Dy0.7Fe2 Alloy”, J Mag. and Mag. Mater., vol.191, p.101-106. (SCI). |
23 |
J.S. Fang, T.S. Chin, J.C. Shih, C.A. Chen and S.W. Yung, (1999), " The ac-initial susceptibility as a measure of exchange coupling in two-phase nano-structured NdFeCuNbB magnet alloys, J Mag. and Mag. Mater., vol.195, p.588-594. (SCI). |
24 |
J.S. Fang and T.S. Chin, (1999 ), " High Temperature cac Behaviors of Fe-Nd-B Nanocomposite Alloy, J. Journal of Material Science, (SCI). |
25 |
J.S. Fang, M.S. Leu and T.S. Chin, (1998), “AC susceptibility of a two-phase nanocomposite Fe88Nd6B6 alloy at 77-990 K”, J. Appl. Phys. Vol.83, p.3731. (SCI). |
26 |
J. S. Fang, M.F. Hsieh, S.K. Chen and T.S. Chin, (1997), “Magnetic properties and structure of Nd-(Fe,B) nanocomposite alloys with fixed Fe/B ratio at 4~ |
27 |
T.S. Chin, F.M. Chen and J.S. Fang, (1997), “Magnetostrictive properties of Tb0.3Dy0.7(Fe1-xVx)2 alloys”, IEEE Trans. on Magn., vol.33, p.3946. (SCI). |
28 |
J.S. Fang, and T.S. Chin, (1996), “ Rapid thermal annealing of two phases nanocrystalline magnet alloys”, Materials Trans., JIM., vol.37, p.883. (SCI). |
29 |
J.S. Fang, S.K. Chen and T.S. Chin, (1996), “ Nanocrystalline Nd6Fe88-xMxB6 (M= Ti or V) Magnets by rapid thermal annealing”, IEEE Trans. on Magn., vol.32, p.4401. (SCI). |
30 |
F.M. Chen, J.S. Fang and T.S. Chin, (1996), ” The effect of carbon on magnetostrictive properties of the Tb0.3Dy0.7Fe2 alloy”, IEEE Trans. on Magn., vol.32, p.4776. (SCI). |
31 |
J.M. Yao, T.S. Chin, J.S. Fang and S.K. Chen, (1995), “ Magnetic aftereffect and magnetization process of nanocrystalline alpha-Fe/Nd2Fe14B two-phases magnet alloy”, IEEE Trans. on Magn., vol.31, p.3611. (SCI). |
研討會論文 |
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國外conference |
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1 |
Jia-Huei Lin , Chen-Sheng Hsu and Jau-Shiung Fang (2009) “ 15 nm Ru Diffusion Barrier on NiSi/Si for Sub-45-nm Cu Contact plug ”, TMS in San Francisco (USA). |
2 |
Wei-Hsiang Luo, Jen-Chieh Yang, Wei-Ming Hsieh, Chia-His Hsu, Ting-Kan Tsai and Jau-Shiung Fang (2009) “Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical |
3 |
謝維銘 楊仁傑 |
4 |
J.S. Fang, Y.S. Lin, C.S. Cheng, Y.C. Lee and H.Y. Hsio (2007) “Enhancement of conductivity and transmittance of Al-doped ZnO thin films prepared by a metallic Zn:Al target” EUROMAT |
5 |
J.S. Fang and H.C. Chen, (2007) “Preparation of the High-Quality Indium Zinc Oxide by Reactive Magnetron Co-sputtering Technique from Indium and Zinc Metallic Targets” TMS in |
6 |
J.S. Fang and W.K. Cheng, (2006) “Evaluation of magnetoresistance characteristic of Co-Ti-O granular alloy thin films” 兩岸顆粒會議, |
7 |
J.S. Fang, T.P. Hsu and L.C. Yang, (2005) “Diffusion Barrier Properties of DC Sputtering Deposited Ta-Ni Films in Cu/SiO2/Si Contact Schemes”, EUROMAT |
8 |
J.S. Fang, M.L. Ker, and T.P. Hsu, (2005) “Thermal stability enhancement of sputtered Ta-Co-N diffusion barrier layer for copper metallization”, EUROMAT |
9 |
Jau-Shiung Fang and Chen-Siang Hsu, (2005) “Designing experimental determination of sheet resistance of a submicron titanium self-aligned silicide formation”, TMS |
10 |
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11 |
李安倫, 方昭訓, 戴明鳳, (2004) “燃燒法合成鐵鎳合金奈米粉末及包覆金的製程與特性”, The Chinese journal of Process Engineering, vol. 4, 218-223. |
12 |
J.S. Fang, F.W. Tsai, and T.S. Chin, (2002) “ Highly [ |
13 |
M.S. Leu, J.S. Fang and T.S. Chin, (2001), “In-Situ Permeability Study of Nano-Crystalline Magnetic Alloys”, Chinese Physics Conference. |
14 |
J.M. Yao, J.S. Fang and T.S. Chin, (1996), “magnetization Reversal of Ti-modified Nd2Fe14B/a-Fe nanocomposite magnets”, International Conference on Rare Earth Permanent Magnets. p.409. |
15 |
J.S. Fang, T.S. Chin and S.K. Chen, (1996), “Magnetic properties of nanocomposite Fe88-xMxNd6B6 magnets (M= Zr or Nb) by rapid thermal annealing” International Conference on Rare Earth Permanent Magnets p.698. |
國內conference |
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16 |
陳蓁慧, 洪士育, 邱敬富, 簡竹模, 方昭訓 (2009) ” 3 nm Ta-C-N阻障層特性與銅製程整合 ” Annual Conference of Taiwan Vacuum Society. |
17 |
王梓育, 方昭訓 (2009) ”Cu (CoN) 合金薄膜之特性探討 ” Annual Conference of Taiwan Vacuum Society. |
18 |
陳蓁慧, 洪士育, 邱敬富, 方昭訓 (2009) ” 超薄Ta-C-N薄膜阻障層與銅製程整合特性探討 ” Journal of Taiwan Society for Metal Heart Treatment. |
19 |
鄭博元, 許銀驛, 鄭力綱, 蘇武加, 邱敬富, 方昭訓 (2009) ”超薄(Ru-Ta)Si-C非晶質擴散阻障層與銅製程整合特性研究 ” Journal of Taiwan Society for Metal Heart Treatment. |
20 |
駱煒翔, 徐嘉禧, 楊仁傑, 方昭訓 (2009) ” Mn:ZnO 透明導電氧化物與稀磁半導體薄膜之製備與性質” Journal of Taiwan Society for Metal Heart Treatment |
21 |
許銀驛, 柏方茹, 張詩沅, 鄭力綱, 邱敬富, 林庭誼, 方昭訓, 金重勳(2009) ” 5 nm Ta-Si-C薄膜特性與銅製程整合 ” Annual Conference of the Chinese Society for Material Science. |
22 |
陳蓁慧, 洪士育, 林家輝, 方昭訓 (2009) ”超薄Ta-C-N薄膜特性與銅製程整合” Annual Conference of the Chinese Society for Material Science. |
23 |
王梓育, 方昭訓 (2009) ” Cu (CoN) 合金薄膜之特性研究 ” Annual Conference of the Chinese Society for Material Science. |
24 |
徐嘉禧, 駱煒翔, 鐘德儒, 方昭訓 (2009) ” 探討DMAB濃度對ZnO化學鍍製備薄膜性質 ” Annual Conference of the Chinese Society for Material Science. |
25 |
鍾德儒, 柏方茹, 徐嘉禧, 方昭訓 (2009) ” 高能隙低電阻Mg摻雜AZO透明導電薄膜製備與性質 ” Annual Conference of the Chinese Society for Material Science. |
26 |
柏方茹, 張詩沅, 鄭怡芬, 鐘德儒, 方昭訓 (2009) ” 銅鋅合金薄膜自我鈍化特性與結構研究 ” Annual Conference of the Chinese Society for Material Science. |
27 |
蘇武加, 林家輝, 許銀驛, 黃孟碩, 林庭誼, 方昭訓 (2009) ” 電漿表面改質Ta-Si-C三元合金薄膜之特性探討 ” Annual Conference of the Chinese Society for Material Science. |
28 |
陳佑慈, 周瑋祖, 蘇武加, 方昭訓 (2008) ”自我鈍化型銅鉿合金薄膜抗氧化性及電性研究” Annual Conference of the Chinese Society for Material Science. |
29 |
黃智祥, 李逸群, 許禎祥, 方昭訓 (2008) ”共濺鍍製備Cu1-xHfx薄膜擴散阻礙特性之研究” Annual Conference of the Chinese Society for Material Science. |
30 |
林家輝, 邱敬富, 周暐祖, 方昭訓 (2008) ”Ru/NiSi/Si應用於銅接觸栓塞擴散阻障層之特性探討” Annual Conference of the Chinese Society for Material Science. |
31 |
謝維銘, 楊仁傑, 駱煒翔, 徐嘉禧, 方昭訓 (2008) ”化學鍍浴沉積法製備ZnO薄膜之性質” Annual Conference of the Chinese Society for Material Science. |
32 |
王梓育, 鍾德儒, 邱敬富, 李景恆, 方昭訓 (2008) ”In:AZO透明導電薄膜之製備與性質” Annual Conference of the Chinese Society for Material Science. |
33 |
周暐祖, 簡竣毅, 許禎祥, 方昭訓 (2008) ”自我鈍化型銅鎂合金薄膜電性及結構特性” Annual Conference of the Chinese Society for Material Science. |
34 |
陳蓁慧, 鄭博元, 洪士育, 邱敬富, 林庭誼, 方昭訓, 楊立中, 金重勳(2008) ”Ta-Si-C阻障層特性探討”Annual Conference of the Chinese Society for Material Science. |
35 |
詹媛婷, 張凱嵐, 鄭易承, 王漢瑜, 方昭訓 (2008) ”添加少量鑭元素之銀薄膜特性之研究” Annual Conference of the Chinese Society for Material Science. |
36 |
駱煒翔, 楊仁傑, 謝維銘, 徐嘉禧, 方昭訓 (2008) ”化學鍍浴沉積製備ZnO透明導電薄膜之研製” Annual Meeting of TACT. |
37 |
陳蓁慧, 洪士育, 鄭博元, 鄭力綱, 邱敬富, 林庭誼, 方昭訓, 金重勳 (2008) ”10 nm之Ta-Si-C阻障層特性與銅製程整合探討” Annual Meeting of TACT. |
38 |
廖士運, 劉家瑋, 邱敬富, 方昭訓, |
39 |
鄭博元, 陳蓁慧, 洪士育, 蘇武加, 邱敬富, 林庭誼, 方昭訓, 金重勳 (2008) ”超薄Ta-Si-C非晶質薄膜之熱穩定性” Journal of Taiwan Society for Metal Heart Treatment. |
40 |
邱敬富, 林家輝, 林庭誼, 方昭訓, 楊立中, 金重勳 (2007) ”超薄鉭矽化物銅製程阻障層特性探討” Annual Conference of the Chinese Society for Material Science. |
41 |
陳佑慈,李逸群, 詹媛婷, 方昭訓, 李景恆, 許禎祥 (2007) ”自我鈍化型銅鉿合金薄膜抗氧化性及電性研究” Annual Conference of the Chinese Society for Material Science. |
42 |
方昭訓, 陳慧津, 黃智祥, 李景恆, 許禎祥 (2007) ”熱處理對金屬靶製備氧化銦鋅薄膜性質之影響” Annual Conference of the Chinese Society for Material Science. |
43 |
洪伯賢, 王梓育, 王珮茹, 賴麗娟, 邱敬富, 李景恆, 許楨祥, 方昭訓 (2007) ”摻雜In之AZO透明導電薄膜性質” Annual Conference of the Chinese Society for Material Science. |
44 |
徐永曄, 謝育倫, 邱敬富, 林家輝, 李景恒, 許禎祥, 方昭訓 (2007) ”微量摻雜鉿之鉭薄膜阻障層特性探討” Annual Conference of the Chinese Society for Material Science. |
45 |
邱敬富, 林家輝, 李逸群, 林庭誼, 方昭訓, 楊立中, 金重勳 (2007) ”超薄Ta-Si-C障層特性探討” Annual Meeting of TACT |
46 |
J.S. Fang, M.L. Ker, H.C. Chen (2006) “Electrical characteristic and microstructure of ternary alloy TaxCoyNz thin films deposited by reactive sputtering”, Annual Conference of Taiwan Vacuum Society. |
47 |
J.S. Fang, H.Y. Hsieh (2006) “自我鈍化型銅銦合金薄膜之固溶特性及電性之研究” Annual Conference of Taiwan Vacuum Society. |
48 |
L. -C. Yang, C. Y. Cheng, J. S. Fang, W. Z. Chang , G. S. Chen (2006)” Characterization of polycrystalline CuInSe2 thin films deposited by sputtering and evaporation as a function of composition” Annual Conference of Taiwan Vacuum Society. |
49 |
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50 |
J.S. Fang, H. C. Chen (2006)” 氧化銦鋅(IZO)非晶質薄膜擴散阻礙特性與銅製程整合” Annual Conference of Taiwan Vacuum Society. |
51 |
林雍舜, 鄭仲祥, 李逸群, 蕭欣儀, 陳慧津, |
52 |
方昭訓, 陳慧津, 黃智祥, |
53 |
方昭訓, 柯銘禮, 陳慧津(2006)” 利用Ta-Co-N作為銅製程擴散阻礙層之研究” Annual Conference of the Chinese Society for Material Science. |
54 |
林家輝, 陳枝政, 黃文良, 戴穎蓁, 陳慧津, |
55 |
紀宗佑, 廖敬期, 陳慧津, |
56 |
李岳修, |
57 |
方昭訓, 賴思宇, 陳佑慈, |
58 |
李彥佑, 陳苡諺,賴思宇, |
59 |
J.S. Fang, M.L. Ker, and T.P. Hsu (2005),” Phase formation and microstructure of amorphous Ta-Co-N thin films on Si substrates”, Annual Conference of the Chinese Society for Material Science. |
60 |
J.S. Fang, H.Y. Hsieh (2005),” Structural and passivative behaviors of Cu(In) thin film” Annual Conference of the Chinese Society for Material Science. |
61 |
JS. Fang, T.P. Hsu, C.H. Hsu and G.S. Chen, (2004) ” Crystallization and failure behaviors of Ta-Ni nanostructured/amorphous diffusion barriers for copper metallization” Annual Conference of the Chinese Society for Material Science. |
62 |
C.M. Zheng, S.H. Zend, J.Y. Zhang, J.L. Zhang, J.W. Lin, Y.R. Li, T.P. Hsu, C.S. Hsu and J.S. Fang, (2004) “Diffusion barrier characteristics of amorphous Ta50Fe50 thin film prepared by a DC sputtering method”, Annual Conference of the Chinese Society for Material Science. |
63 |
T.H. Hsu, S.C. Zhang, P.J. Chen, B.Y. Chen, T.P. Hsu, C.S. Hsu and J.S. Fang, (2004) “ Diffusion barrier properties of amorphous Ta-Co thin film for copper metalization”, Annual Conference of the Chinese Society for Material Science. |
64 |
方昭訓, 曾王坡, 許藻錶, (2003) “Crystallization and failure behaviors of Ta-Co nanostructured/amorphous diffusion barriers for copper metallization” 材料年會論文集。 |
65 |
方昭訓 “Evaluation of Sheet Resistance for |
66 |
方昭訓、嚴楚才、王俊彬、林俊樺、陳錦山, (2001), “高溫現場沉積製作矽化鎳之熱穩定性”, 真空科技年會論文。 |
67 |
方昭訓、嚴楚才、王俊彬、林俊樺、鍾松畛、徐麒欽、陳錦山, (2001), “高溫現場沉積生成矽化鎳之活化能” 材料年會論文集。 |
68 |
J.S. Fang, M.F. Chen and T.S. Chin, (1997), “Impurity phases in rapidly annealed Fe-Nd-B nanocomposite alloys”, 磁性年會論文集。 |
69 |
J.S. Fang, M.S. Leu and T.S. Chin, (1997), ” High temperature Ac susceptibility study of a two-phase Fe-Nd-B nanocomposite”, 磁性年會論文集。 |
70 |
陳豐謀,方昭訓,施智超,金重勳 (1997), ”添加碳、釩對Tb0.3Dy |
71 |
M.F. Hsieh, J.S. Fang and T.S. Chin, “ magnetic properties of nanocomposites Ndx(Fe0.993B0.067)100-x (x=3~11)”, 磁性年會論文集 (1996). |
72 |
方昭訓,金重勳, (1996), ”快速退火熱處理雙相納米晶磁性合金”, 磁性年會論文集。 |
73 |
陳豐謀,方昭訓,金重勳, (1996),“釩元素置換Terfenol-D合金中的鐵對磁伸縮的影響” 材料年會論文集。 |
74 |
姚俊敏,方昭訓,金重勳, (1995), “ Nd |
國內期刊 |
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62 |
方昭訓 (2002)“自行對準金屬矽化物在積體電路之應用” 真空科技, 第14卷第4期 38頁。 |
專利、專書或專書論文 |
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方昭訓、謝文益、游萃蓉 形成阻障層之方法及形成之結構中華民國專利 發明第147346號。 專利權期間: |
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方昭訓、柳璐明 積體電路之自動對準金屬矽化物製程 中華民國專利 發明第126310號。 專利權期間: |
3 |
柳璐明、方昭訓 自行對準矽化物製程中增加閘極有效長度的方法 中華民國專利 發明第131956號。 專利權期間: |
4 |
蔡騰群、方昭訓、柳璐明 防止閘極與源\汲極橋接之自行對準矽化物製程中華民國專利 發明第123062號。 專利權期間: |
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專利權期間: |
技術報告及其他 |
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其他參與活動 |
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參加國際學術研討會 |
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2009, TMS in |
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2008, EUROMAT in |
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2008, 兩岸顆粒會議,上海,大陸。 |
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2007, ANSTO in Sidney, Australlia. |
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2007, TMS in |
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2006, 兩岸顆粒會議,北京,大陸。 |
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2005, EUROMAT in Pargue, C.Z. |
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2005, TMS in |
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2004, 兩岸顆粒會議,煙台,大陸。 |
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2003, Nano in |
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2002, Intermag in |
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2000, IITC in |
參與之學術團體 |
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學術榮譽 |
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台灣鍍膜年會論文-佳作 (2007) ”超薄鉭矽化物銅製程阻障層特性探討” Annual Meeting of TACT |
2 |
台灣鍍膜年會論文-佳作 (2008) ” 化學鍍浴沉積製備ZnO透明導電薄膜之研製 ” Annual Meeting of TACT |
3 |
台灣熱處理年會論文-第二名 (2008) ”超薄Ta-Si-C非晶質薄膜之熱穩定性” Journal of Taiwan Society for Metal Heart Treatment |
4 |
台灣熱處理年會論文-佳作 (2009) ”超薄(Ru-Ta)Si-C非晶質擴散阻障層與銅製程整合特性研究 ” Journal of Taiwan Society for Metal Heart Treatment. |
個人其他補充資料 |
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